• DocumentCode
    267769
  • Title

    Development of micro variable optics array

  • Author

    Yongjoo Kwon ; Yoonsun Choi ; Kyuhwan Choi ; YunHee Kim ; Seungyul Choi ; Junghoon Lee ; Jungmok Bae

  • Author_Institution
    Samsung Adv. Inst. of Technol., Samsung Electron. Co., Ltd., Yongin, South Korea
  • fYear
    2014
  • fDate
    26-30 Jan. 2014
  • Firstpage
    72
  • Lastpage
    75
  • Abstract
    This research is on the development of a micro variable optics array which employs electrowetting as the working principle. The single pixel of the array has four separated electrodes and each of them is controlled independently giving the device multi-degree of freedom. The separated electrodes are fabricated using a thick photoresist and electroplating. Several formulas showing the relation among the radius of curvature, the prism angle, and electrowetting parameters are provided. The prism angles are measured to be ±30° and compared to the calculated values. The measurement of the radius of curvature is also presented showing that the various radiuses of curvature are achievable from concave to convex.
  • Keywords
    electrodes; electroplating; integrated optics; integrated optoelectronics; micro-optics; optical arrays; optical fabrication; photoresists; wetting; concave curvature; convex curvature; curvature radius; electrodes; electroplating; electrowetting; microvariable optics array; prism angle; thick photoresist; Arrays; Electrodes; Laser beams; Liquids; Measurement by laser beam; Optics; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
  • Conference_Location
    San Francisco, CA
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2014.6765576
  • Filename
    6765576