Title :
Development of micro variable optics array
Author :
Yongjoo Kwon ; Yoonsun Choi ; Kyuhwan Choi ; YunHee Kim ; Seungyul Choi ; Junghoon Lee ; Jungmok Bae
Author_Institution :
Samsung Adv. Inst. of Technol., Samsung Electron. Co., Ltd., Yongin, South Korea
Abstract :
This research is on the development of a micro variable optics array which employs electrowetting as the working principle. The single pixel of the array has four separated electrodes and each of them is controlled independently giving the device multi-degree of freedom. The separated electrodes are fabricated using a thick photoresist and electroplating. Several formulas showing the relation among the radius of curvature, the prism angle, and electrowetting parameters are provided. The prism angles are measured to be ±30° and compared to the calculated values. The measurement of the radius of curvature is also presented showing that the various radiuses of curvature are achievable from concave to convex.
Keywords :
electrodes; electroplating; integrated optics; integrated optoelectronics; micro-optics; optical arrays; optical fabrication; photoresists; wetting; concave curvature; convex curvature; curvature radius; electrodes; electroplating; electrowetting; microvariable optics array; prism angle; thick photoresist; Arrays; Electrodes; Laser beams; Liquids; Measurement by laser beam; Optics; Shape;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765576