DocumentCode
2678020
Title
Quartz crystal element for angular rate sensor
Author
Matsudo, Hideryo ; Ishihara, Minoru ; Kawasaki, Syusaku ; Yukawa, Jyunich ; Hatanaka, M.
Author_Institution
Nihon Dempa Kogyo Co. Ltd., Saitama, Japan
fYear
2000
fDate
2000
Firstpage
91
Lastpage
95
Abstract
We developed the quartz crystal element for angular rate sensors. In particular, we developed the element using the tuning fork quartz chip manufactured by the mechanical cutting method. The element has suitable characteristics for angular rate sensors. We also have studied appropriate design and manufacture of the element for angular rate sensors
Keywords
angular velocity measurement; crystal resonators; cutting; electric sensing devices; vibrations; SiO2; angular rate sensors; control circuit; mechanical cutting; null signal; offset voltage control; quartz crystal element; tuning fork quartz chip; Circuit optimization; Cities and towns; Electrodes; Glass; Manufacturing; Mechanical sensors; Monitoring; Sensor phenomena and characterization; Vacuum technology; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
Conference_Location
Kansas City, MO
ISSN
1075-6787
Print_ISBN
0-7803-5838-4
Type
conf
DOI
10.1109/FREQ.2000.887335
Filename
887335
Link To Document