Title :
Quartz crystal element for angular rate sensor
Author :
Matsudo, Hideryo ; Ishihara, Minoru ; Kawasaki, Syusaku ; Yukawa, Jyunich ; Hatanaka, M.
Author_Institution :
Nihon Dempa Kogyo Co. Ltd., Saitama, Japan
Abstract :
We developed the quartz crystal element for angular rate sensors. In particular, we developed the element using the tuning fork quartz chip manufactured by the mechanical cutting method. The element has suitable characteristics for angular rate sensors. We also have studied appropriate design and manufacture of the element for angular rate sensors
Keywords :
angular velocity measurement; crystal resonators; cutting; electric sensing devices; vibrations; SiO2; angular rate sensors; control circuit; mechanical cutting; null signal; offset voltage control; quartz crystal element; tuning fork quartz chip; Circuit optimization; Cities and towns; Electrodes; Glass; Manufacturing; Mechanical sensors; Monitoring; Sensor phenomena and characterization; Vacuum technology; Vibrations;
Conference_Titel :
Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
Conference_Location :
Kansas City, MO
Print_ISBN :
0-7803-5838-4
DOI :
10.1109/FREQ.2000.887335
