Langasite surface acoustic wave sensors for high temperatures

Author

Honal, M. ; Fachberge, R. ; Holzheu, T. ; Riha, E. ; Born, E. ; Pongratz, P. ; Bausewe, A.

Author_Institution

Corp. Technol., Siemens AG, Germany

fYear

2000

fDate

2000

Firstpage

113

Lastpage

118

Abstract

Langasite (La₃Ga₅SiO₁₄) has been used successfully as a piezoelectric substrate for surface acoustic wave (SAW) devices operating up to 1000°C. New investigations of material properties concerning the quality as well as the stability at high temperatures are presented. Apart from high temperature measurements on SAW devices and thermal analyses, optical absorption properties and the electric conductivity have been investigated. The crystal quality has been examined by various methods such as X-ray topography and chemical etching combined with optical microscopy for many LGS wafers from different growers

Keywords

X-ray topography; absorption coefficients; crystal growth from melt; differential scanning calorimetry; etching; gallium compounds; high-temperature techniques; lanthanum compounds; mechanical birefringence; optical microscopy; piezoelectric materials; surface acoustic wave delay lines; surface acoustic wave sensors; surface conductivity; temperature measurement; thermal stability; 1000 C; CZ growth; DSC; La₃Ga₅SiO₁₄; X-ray topography; chemical etching; high temperatures; langasite surface acoustic wave sensors; material quality; material stability; optical absorption properties; piezoelectric substrate; reflective delay lines; stress birefringence; surface conductivity; thermal analyses; thermal stability; Acoustic sensors; Acoustic waves; Optical microscopy; Optical sensors; Optical surface waves; Surface acoustic wave devices; Surface acoustic waves; Surface topography; Temperature sensors; Thermal conductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International

Conference_Location

Kansas City, MO

ISSN

1075-6787

Print_ISBN

0-7803-5838-4

Type

conf

DOI

10.1109/FREQ.2000.887339

Filename

887339