• DocumentCode
    2678112
  • Title

    Frequency and equivalent circuit constant characteristics versus relative humidity for AT-cut quartz resonators

  • Author

    Shimamoto, Yoshiro ; Kuroiwa, Mayumi ; Teramoto, Nariaki ; Wakamoto, Satoru ; Imai, Hitoshi ; NAKAZAWA, Mitsuo

  • Author_Institution
    Fac. of Eng., Shinshu Univ., Nagano, Japan
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    119
  • Lastpage
    123
  • Abstract
    We propose the use of AT-cut quartz resonators as humidity sensors. This research was conducted experimentally to investigate both nonlinear frequency vs. relative humidity effects and nonlinear equivalent circuit constant vs. relative humidity effects on AT-cut quartz resonators
  • Keywords
    crystal resonators; equivalent circuits; humidity sensors; AT-cut quartz resonators; SiO2; equivalent circuit constant characteristics; frequency characteristics; high stability; multiple adsorption layers; nonlinear characteristics; quartz humidity sensors; relative humidity; Density measurement; Electrodes; Equations; Equivalent circuits; Friction; Gas detectors; Humidity measurement; Resonant frequency; Sensor phenomena and characterization; Viscosity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
  • Conference_Location
    Kansas City, MO
  • ISSN
    1075-6787
  • Print_ISBN
    0-7803-5838-4
  • Type

    conf

  • DOI
    10.1109/FREQ.2000.887340
  • Filename
    887340