DocumentCode
2678112
Title
Frequency and equivalent circuit constant characteristics versus relative humidity for AT-cut quartz resonators
Author
Shimamoto, Yoshiro ; Kuroiwa, Mayumi ; Teramoto, Nariaki ; Wakamoto, Satoru ; Imai, Hitoshi ; NAKAZAWA, Mitsuo
Author_Institution
Fac. of Eng., Shinshu Univ., Nagano, Japan
fYear
2000
fDate
2000
Firstpage
119
Lastpage
123
Abstract
We propose the use of AT-cut quartz resonators as humidity sensors. This research was conducted experimentally to investigate both nonlinear frequency vs. relative humidity effects and nonlinear equivalent circuit constant vs. relative humidity effects on AT-cut quartz resonators
Keywords
crystal resonators; equivalent circuits; humidity sensors; AT-cut quartz resonators; SiO2; equivalent circuit constant characteristics; frequency characteristics; high stability; multiple adsorption layers; nonlinear characteristics; quartz humidity sensors; relative humidity; Density measurement; Electrodes; Equations; Equivalent circuits; Friction; Gas detectors; Humidity measurement; Resonant frequency; Sensor phenomena and characterization; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
Conference_Location
Kansas City, MO
ISSN
1075-6787
Print_ISBN
0-7803-5838-4
Type
conf
DOI
10.1109/FREQ.2000.887340
Filename
887340
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