Quadric analysis for AT-cut quartz resonator humidity sensors

Author

NAKAZAWA, Mitsuo ; Kuroiwa, Mayumi ; Shimamoto, Yasuhiro ; Iwahashi, Hirosuke ; Wakamoto, Satoru

Author_Institution

Fac. of Eng., Shinshu Univ., Nagano, Japan

fYear

2000

fDate

2000

Firstpage

124

Lastpage

127

Abstract

A new precision quadric model was proposed for the frequency equation of AT-cut resonator humidity sensors by taking reciprocal action among surface roughness, relative humidity and temperature into account, and by comparing the adsorption water molecule amounts derived from the B.E.T. adsorption equation with experimental results. Including the B.E.T. adsorption equation in the closed interval of zero to 0.5 for relative humidity, our theory agreed with experimental results

Keywords

adsorption; crystal resonators; humidity sensors; surface topography; AT-cut quartz resonator; BET adsorption equation; SiO₂; adsorption water molecule amounts; frequency equation; humidity sensors; precision quadric model; quadric analysis; reciprocal action; relative humidity; surface roughness; temperature; thickness-shear mode; Electromechanical sensors; Equations; Gas detectors; Humidity; Mechanical sensors; Resonance; Resonant frequency; Rough surfaces; Surface roughness; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International

Conference_Location

Kansas City, MO

ISSN

1075-6787

Print_ISBN

0-7803-5838-4

Type

conf

DOI

10.1109/FREQ.2000.887341

Filename

887341