Title :
Quadric analysis for AT-cut quartz resonator humidity sensors
Author :
NAKAZAWA, Mitsuo ; Kuroiwa, Mayumi ; Shimamoto, Yasuhiro ; Iwahashi, Hirosuke ; Wakamoto, Satoru
Author_Institution :
Fac. of Eng., Shinshu Univ., Nagano, Japan
Abstract :
A new precision quadric model was proposed for the frequency equation of AT-cut resonator humidity sensors by taking reciprocal action among surface roughness, relative humidity and temperature into account, and by comparing the adsorption water molecule amounts derived from the B.E.T. adsorption equation with experimental results. Including the B.E.T. adsorption equation in the closed interval of zero to 0.5 for relative humidity, our theory agreed with experimental results
Keywords :
adsorption; crystal resonators; humidity sensors; surface topography; AT-cut quartz resonator; BET adsorption equation; SiO2; adsorption water molecule amounts; frequency equation; humidity sensors; precision quadric model; quadric analysis; reciprocal action; relative humidity; surface roughness; temperature; thickness-shear mode; Electromechanical sensors; Equations; Gas detectors; Humidity; Mechanical sensors; Resonance; Resonant frequency; Rough surfaces; Surface roughness; Temperature sensors;
Conference_Titel :
Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
Conference_Location :
Kansas City, MO
Print_ISBN :
0-7803-5838-4
DOI :
10.1109/FREQ.2000.887341
