Stress-driven MEMS assembly + electrostatic forces = 1mm diameter robot

As the size of the modules in a self-reconfiguring modular robotic system shrinks and the number of modules increases, the flexibility of the system as a whole increases. In this paper, we describe the manufacturing methods and mechanisms for a 1 millimeter diameter module which can be manufactured en masse. The module is the first step towards realizing the basic unit of claytronics, a modular robotic system designed to scale to millions of units.