Title :
Nano-porous SIO2 electret with high surface potential and high thermal resistance
Author :
Suzuki, M. ; Wada, Tomotaka ; Takahashi, Tatsuro ; Nishida, Tsutomu ; Yoshikawa, Yasuhiro ; Aoyagi, Shigehisa
Author_Institution :
Kansai Univ., Suita, Japan
Abstract :
This paper proposes a new electret with high surface potential and high thermal resistance, which is made of nano-porous SiO2. Electrical charge density in the nano-porous SiO2 is higher than that in a normal (i.e., nonporous) SiO2 because there are many voids in the nano-porous SiO2 and the interface between void and SiO2 traps electrical charges strongly. Therefore, decrease rate of the trapped charge density in the nano-porous SiO2 is lower than that of normal SiO2. Since SiO2 is thermally stable, thermal stability of the electrical charge in nano-porous SiO2 electret is better than that in a polymer electret. Output power generated by vibration energy harvesting using the nano-porous SiO2 electret is also larger than that using the normal SiO2 or polymer electret.
Keywords :
electrets; energy harvesting; nanoporous materials; silicon compounds; surface potential; thermal resistance; thermal stability; electrical charge density; electrical charges; energy harvesting; nanoporous electret; nanoporous materials; polymer electret; surface potential; thermal resistance; thermal stability; void; Electrets; Power generation; Resistance; Silicon; Substrates; Thermal stability; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765665
