Title :
SAW resonators of SiO2/ZnO/diamond structure in GHz range
Author :
Nakahata, H. ; Hachigo, A. ; Itakura, K. ; Fujii, S. ; Shikata, S.
Author_Institution :
Sumitomo Electr. Ind. Ltd., Hyogo, Japan
Abstract :
Surface acoustic wave (SAW) characteristics of the SiO2/in interdigital-transducer(IDT)/ZnO/diamond structure were studied, and it was found that the 2nd Sezawa mode in this structure can provide superior SAW characteristics of a zero temperature coefficient of frequency (TCF), a high velocity of 10,000 m/s and a large electromechanical coupling coefficient of 1.2%. Several kinds of SAW resonators were successfully fabricated with this structure, which resulted in superior characteristics with the minimum insertion losses from 6.7 to 13.4 dB, Q values from 680 to 1600, at the center frequencies of 2.488, 2.666 and 3.061 GHz. Their frequency shifts in the temperature range from 0 to 85°C were no more than 50 ppm which is smaller than those of ST-cut quartz or 36Y-cut quartz. These characteristics are superior to those ever realized for a GHz SAW resonator
Keywords :
diamond; numerical analysis; silicon compounds; surface acoustic wave resonators; zinc compounds; 0 to 85 C; 0 to 85°C; 10,000 m/s; 2.488 GHz; 2.666 GHz; 2nd Sezawa mode; 3.061 GHz; 6.7 to 13.4 dB; GHz SAW resonator; Q values 680 to 1600; Si; Si substrate; SiO2-ZnO-C; SiO2/ZnO/diamond structure; center frequency 2.488 GHz; center frequency 2.666 GHz; center frequency 3.061 GHz; electromechanical coupling coefficient; frequency shifts; minimum insertion losses 6.7 to 13.4 dB; zero temperature coefficient of frequency; Electrodes; Fabrication; Optical resonators; Radio frequency; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature; Zinc oxide;
Conference_Titel :
Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
Conference_Location :
Kansas City, MO
Print_ISBN :
0-7803-5838-4
DOI :
10.1109/FREQ.2000.887373
