Wafer-scale flexible graphene loudspeakers

In this paper, wafer-scale flexible graphene loudspeakers are fabricated in one-step laser scribing technology. Current fabrication process for graphene devices is mainly based on chemical vapor deposition graphene, which needs several hours´ graphene growth, transfer and patterning. By using this new laser scribing technology, wafer-scale graphene patterns can be obtained in 25 minutes with low cost. The flexible graphene loudspeaker is demonstrated to be high performance with wide-band sound generation from 1~50 kHz, which indicated that the laser scribed graphene could be widely used in integrating wafer-scale graphene-based acoustic devices.