Title :
Continuous dynamic timing measurements to monitor spring and surface forces in MEMS switch reliability
Author :
Kosla, Cezary ; Fitzgerald, Padraig ; Hill, Mark
Author_Institution :
Cork Inst. of Technol., Cork, Ireland
Abstract :
In this work we demonstrate an automatic reliability detection/prediction system for industry manufactured ohmic MEMS switches based on dynamic time measurements. The developed method allows for constant device monitoring and highlights the influence of both restoring and surface forces evolution on switch reliability. Also for the first time it allows for an identification of an imminent device failure due to its continuous monitoring. We present the scalability of this approach by testing it on six different, industry-manufactured switch types and on a large number of samples.
Keywords :
failure analysis; microswitches; reliability; springs (mechanical); time measurement; MEMS switch reliability; automatic reliability detection system; automatic reliability prediction system; continuous dynamic timing measurements; device failure identification; ohmic MEMS switches; spring forces; surface forces; Contacts; Micromechanical devices; Microswitches; Monitoring; Reliability; Springs;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765711
