Title :
Thin-film magnesium as a sacrificial and biodegradable material
Author :
Yang Liu ; Jungwook Park ; Chang, Jay Han-Chieh ; Yu-chong Tai
Author_Institution :
California Inst. of Technol., Pasadena, CA, USA
Abstract :
This work reports the study of ebeam-deposited thin-film magnesium (Mg) as a sacrificial and a biodegradable material. We have tested etchants including diluted hydrochloric acid (HCl), saline, and culture medium. Both vertical etching method and channel undercut method are used to characterize the Mg etching properties. The initial results confirm that thin-film Mg is a promising dual sacrificial and biodegradable material. In addition, an etching model, which fits accurately the etching length vs. time over a wide range of HCl concentrations (0.02-1M) is developed. This model is based on diffusion and a combined first-and-second order chemical reaction mechanism.
Keywords :
biodegradable materials; electron beam deposition; etching; magnesium; metallic thin films; HCl concentrations; Mg; Mg etching properties; biodegradable material; channel undercut method; culture medium; diffusion; diluted hydrochloric acid; e-beam-deposited magnesium thin film; etchants; etching length; first-and-second order chemical reaction mechanism; sacrificial material; saline medium; vertical etching method; Biodegradable materials; Chemicals; Etching; Hydrogen; Magnesium; Microchannel; Resists;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765726