Title :
3-D hemispherical micro glass-shell resonator with integrated electrostatic excitation and capacitive detection transducers
Author :
Rahman, Md Mamunur ; Yan Xie ; Mastrangelo, Carlos ; Hanseup Kim
Author_Institution :
Electr. & Comput. Eng., Univ. of Utah, Salt Lake City, UT, USA
Abstract :
This paper reports the development and performance of a 3-D hemispherical micro glass-shell resonator with integrated electrostatic excitation and capacitive detection transducers. A new fabrication method has been developed for a hemispherical micro glass-shell resonator with glass ball molding as well as a self-guided-alignment process to maintain the gap distance between the electrodes and the shell uniform. The fabricated micro glass-shell resonator produced the first vibration mode of resonance at 5.843KHz with a quality factor of 730 at atmosphere with the time decay constant of 39.78ms. The diameter of the fabricated glass-shell resonator was measured as 1mm with shell thickness of 1.2μm.
Keywords :
capacitive sensors; electrostatic devices; microelectrodes; microfabrication; micromechanical resonators; microsensors; vibrations; 3D hemispherical micro glass-shell resonator; capacitive detection transducers; electrodes; fabrication method; frequency 5.843 kHz; glass ball molding; integrated electrostatic excitation; self-guided-alignment process; size 1 mm; size 1.2 mum; time 39.78 ms; vibration mode; Bonding; Electrodes; Etching; Frequency measurement; Glass; Metals; Resonant frequency;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765730
