An all optical shock sensor based on buckled doubly-clamped silicon beam

Author

Dong, Binhong ; Huang, J.G. ; Cai, H. ; Kropelnicki, Piotr ; Randles, A.B. ; Gu, Yuan Dong ; Liu, A.Q.

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

692

Lastpage

695

Abstract

In this paper, an all optical shock sensor based on a buckled doubly-clamped silicon beam is demonstrated. A buckled silicon beam is in the middle of two ring resonator and it has two stable positions. The silicon beam encounters a snap-through process upon a shock force, which can be monitored by measuring the resonance wavelength of the ring resonators. During experiment, a 0.15 nm wavelength is observed for a > 50 g shock. It has merits such as fast response, low power consumption and immunity to electromagnetic interference. It can be applied to inertial navigation system and automotive industry.

Keywords

clamps; elemental semiconductors; optical fabrication; optical resonators; optical sensors; optical variables measurement; silicon; Si; all optical shock sensor; automotive industry; buckled doubly-clamped silicon beam; electromagnetic interference; inertial navigation system; optical fabrication; resonance wavelength measurement; ring resonator; shock force; snap-through process; wavelength 0.15 mum; Electric shock; Laser beams; Optical refraction; Optical ring resonators; Optical sensors; Optical switches; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765735

Filename

6765735