Title :
An efficient earth magnetic field MEMS sensor: Modelling and experimental results
Author :
Bagherinia, M. ; Corigliano, Alberto ; Mariani, Stefano ; Horsley, David A. ; Mo Li ; Lasalandra, E.
Author_Institution :
Dept. of Civil & Environ. Eng., Politec. di Milano, Milan, Italy
Abstract :
The paper presents the experimental results and performance indexes of a new z-axis Lorentz force MEMS magnetometer with simple design, reduced dimensions and high efficiency. An ad-hoc formulated multi-physics approach is exploited to compute the sensor dynamics. Possible parasitic acceleration sensitivity is mechanically canceled in the proposed device. Optimality of the proposed configuration is discussed by means of an ad hoc formulated parameter optimization approach.
Keywords :
geomagnetism; magnetometers; microsensors; optimisation; Earth magnetic field; Lorentz force; MEMS magnetometer; MEMS sensor; acceleration sensitivity; ad-hoc formulated multiphysics; parameter optimization; sensor dynamics; Bandwidth; Lorentz covariance; Magnetic fields; Magnetometers; Micromechanical devices; Optimization; Sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765737
