DocumentCode
267935
Title
Electromechanical damping in MEMS accelerometers: A way towards single chip gyrometer accelerometer co-integration
Author
Deimerly, Y. ; Rey, Patrice ; Robert, Philippe ; Bourouina, Tarik ; Jourdan, G.
Author_Institution
LETI, CEA, Grenoble, France
fYear
2014
fDate
26-30 Jan. 2014
Firstpage
725
Lastpage
728
Abstract
This paper reports a method for controlling mechanical damping in MEMS devices. It consists in coupling a micro resonator to an electrical resistance that provides an additional damping source. Quality factor of individual MEMS can then be individually controlled. Quality factor tuning offers an efficient solution to solve the co-integration issue of accelerometer with gyrometer inside a same MEMS cavity under low pressure.
Keywords
Q-factor; accelerometers; damping; micromechanical resonators; MEMS accelerometers; MEMS cavity; MEMS devices; electrical resistance; electromechanical damping; microresonator; quality factor; single chip gyrometer accelerometer; Accelerometers; Capacitance; Cavity resonators; Damping; Micromechanical devices; Resistance; Sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location
San Francisco, CA
Type
conf
DOI
10.1109/MEMSYS.2014.6765743
Filename
6765743
Link To Document