Title :
Electromechanical damping in MEMS accelerometers: A way towards single chip gyrometer accelerometer co-integration
Author :
Deimerly, Y. ; Rey, Patrice ; Robert, Philippe ; Bourouina, Tarik ; Jourdan, G.
Author_Institution :
LETI, CEA, Grenoble, France
Abstract :
This paper reports a method for controlling mechanical damping in MEMS devices. It consists in coupling a micro resonator to an electrical resistance that provides an additional damping source. Quality factor of individual MEMS can then be individually controlled. Quality factor tuning offers an efficient solution to solve the co-integration issue of accelerometer with gyrometer inside a same MEMS cavity under low pressure.
Keywords :
Q-factor; accelerometers; damping; micromechanical resonators; MEMS accelerometers; MEMS cavity; MEMS devices; electrical resistance; electromechanical damping; microresonator; quality factor; single chip gyrometer accelerometer; Accelerometers; Capacitance; Cavity resonators; Damping; Micromechanical devices; Resistance; Sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765743
