Title :
SUB-0.05° precision optofluidic dual-axis inclinometer
Author :
Wahl, Sebastian ; Marty, Frederic ; Pavy, Nicolas ; Mercier, Bruno ; Angelescu, Dan E.
Author_Institution :
ESYCOM Lab., Univ. Paris-Est, Paris, France
Abstract :
This paper details a low-power bi-axial miniaturized inclinometer based on a mobile mass (spherical ball or fluidic droplet) positioned on a precision curved surface that is generated using a novel MEMS process. The detection of the mobile mass was implemented through an external optical system, using a quadrant photodetector. Nanotopography and chemical treatment of the curved surface have been implemented to increase accuracy when using a fluidic mobile mass, by tailoring wetting properties and minimizing contact angle hysteresis. We achieve a range of ±1° with a true linear bi-axial measurement of precision better than 0.05°.
Keywords :
contact angle; drops; micro-optomechanical devices; microfluidics; photodetectors; surface treatment; wetting; MEMS; chemical treatment; contact angle hysteresis; external optical system; fluidic droplet; fluidic mobile mass; linear biaxial precision measurement; low-power bi-axial miniaturized inclinometer; nanotopography; quadrant photodetector; spherical ball; sub-0.05° precision optofluidic dual-axis inclinometer; wetting; Mobile communication; Optical sensors; Prototypes; Rough surfaces; Silicon; Surface treatment;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765761
