SUB-0.05° precision optofluidic dual-axis inclinometer

Author

Wahl, Sebastian ; Marty, Frederic ; Pavy, Nicolas ; Mercier, Bruno ; Angelescu, Dan E.

Author_Institution

ESYCOM Lab., Univ. Paris-Est, Paris, France

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

797

Lastpage

800

Abstract

This paper details a low-power bi-axial miniaturized inclinometer based on a mobile mass (spherical ball or fluidic droplet) positioned on a precision curved surface that is generated using a novel MEMS process. The detection of the mobile mass was implemented through an external optical system, using a quadrant photodetector. Nanotopography and chemical treatment of the curved surface have been implemented to increase accuracy when using a fluidic mobile mass, by tailoring wetting properties and minimizing contact angle hysteresis. We achieve a range of ±1° with a true linear bi-axial measurement of precision better than 0.05°.

Keywords

contact angle; drops; micro-optomechanical devices; microfluidics; photodetectors; surface treatment; wetting; MEMS; chemical treatment; contact angle hysteresis; external optical system; fluidic droplet; fluidic mobile mass; linear biaxial precision measurement; low-power bi-axial miniaturized inclinometer; nanotopography; quadrant photodetector; spherical ball; sub-0.05° precision optofluidic dual-axis inclinometer; wetting; Mobile communication; Optical sensors; Prototypes; Rough surfaces; Silicon; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765761

Filename

6765761