DocumentCode
267954
Title
Tuning of nonlinearities and quality factor in a mode-matched gyroscope
Author
Tatar, E. ; Mukherjee, Tridib ; Fedder, Gary K.
Author_Institution
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
fYear
2014
fDate
26-30 Jan. 2014
Firstpage
801
Lastpage
804
Abstract
This paper examines methods to electrically tune quality factor (Q) and cubic softening nonlinearity of a mode-matched MEMS gyroscope. The gyroscope includes traditional drive-sense combs and dedicated shaped combs for cubic nonlinearity and frequency tuning. In addition to nonlinearity, Q can be tuned by understanding the nature of the losses. Interconnect resistances are added to the electromechanical resonator model to capture the electrical losses that depend on the applied DC proof mass potential.
Keywords
Q-factor; circuit tuning; gyroscopes; integrated circuit interconnections; micromechanical resonators; cubic nonlinearity; cubic softening nonlinearity; drive-sense combs; electrical losses; electrically tune quality factor; electromechanical resonator; frequency tuning; interconnect resistances; mode-matched MEMS gyroscope; nonlinearity tuning; shaped combs; Fingers; Gyroscopes; Micromechanical devices; Q-factor; Rotors; Softening; Tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location
San Francisco, CA
Type
conf
DOI
10.1109/MEMSYS.2014.6765762
Filename
6765762
Link To Document