2D resonant microscanner for dual axes confocal fluorescence endomicroscope

Author

Haijun Li ; Zhen Qiu ; Xiyu Duan ; Oldham, Kenn R. ; Kurabayashi, Katsuo ; Wang, Thomas D.

Author_Institution

Dept. of Internal Med., Univ. of Michigan, Ann Arbor, MI, USA

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

805

Lastpage

808

Abstract

In this paper, we present a two-dimensional (2D) electrostatically actuated Micro-Electro-Mechanical System (MEMS) resonant microscanner for a miniature dual axes confocal fluorescence endomicroscope with an outer diameter (OD) of 5 mm, in which the scanner will be used to achieve a large field of view (FOV) in real-time for en-face imaging. The device has a compact and robust gimbal structure design, which enables a reflective mirror with high fill-in factor to perform high-speed 2D scanning with large tilting angles. Devices with a good optical quality mirror surfaces are produced using a three-step deep reactive-ion etching (DRIE)” silicon-on-isolator (SOI) micromachining process on a single wafer with three masks.

Keywords

bioMEMS; biomedical optical imaging; electrostatics; endoscopes; fluorescence; microactuators; micromachining; mirrors; optical microscopy; silicon-on-insulator; sputter etching; 2D electrostatically actuated MEMS; 2D resonant microscanner; SOI micromachining process; dual axes confocal fluorescence endomicroscope; en-face imaging; masks; microelectro mechanical system; reflective mirror; silicon-on-isolator; size 5 mm; three-step deep reactive-ion etching; tilting angles; wafer; Etching; High-speed optical techniques; Mirrors; Optical device fabrication; Optical imaging; Optical reflection;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765763

Filename

6765763