Title :
2D resonant microscanner for dual axes confocal fluorescence endomicroscope
Author :
Haijun Li ; Zhen Qiu ; Xiyu Duan ; Oldham, Kenn R. ; Kurabayashi, Katsuo ; Wang, Thomas D.
Author_Institution :
Dept. of Internal Med., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
In this paper, we present a two-dimensional (2D) electrostatically actuated Micro-Electro-Mechanical System (MEMS) resonant microscanner for a miniature dual axes confocal fluorescence endomicroscope with an outer diameter (OD) of 5 mm, in which the scanner will be used to achieve a large field of view (FOV) in real-time for en-face imaging. The device has a compact and robust gimbal structure design, which enables a reflective mirror with high fill-in factor to perform high-speed 2D scanning with large tilting angles. Devices with a good optical quality mirror surfaces are produced using a three-step deep reactive-ion etching (DRIE)” silicon-on-isolator (SOI) micromachining process on a single wafer with three masks.
Keywords :
bioMEMS; biomedical optical imaging; electrostatics; endoscopes; fluorescence; microactuators; micromachining; mirrors; optical microscopy; silicon-on-insulator; sputter etching; 2D electrostatically actuated MEMS; 2D resonant microscanner; SOI micromachining process; dual axes confocal fluorescence endomicroscope; en-face imaging; masks; microelectro mechanical system; reflective mirror; silicon-on-isolator; size 5 mm; three-step deep reactive-ion etching; tilting angles; wafer; Etching; High-speed optical techniques; Mirrors; Optical device fabrication; Optical imaging; Optical reflection;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765763
