DocumentCode :
2679628
Title :
Fabrication Of Si Planar Apertured Array For High Speed Near-field Optical Storage And Readout
Author :
Lee, Matthew B. ; Nakano, T. ; Yatsui, T. ; Kourogi, Masakatsu ; Tsutsui, K. ; Atoda, N. ; Ohtsu, M.
Author_Institution :
Interdisciplimay Graduate School of Science and Engineering, Tokyo Ins fitute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226, JAPAN
fYear :
1997
fDate :
14-18 July 1997
Firstpage :
91
Lastpage :
92
Keywords :
Apertures; Etching; High speed optical techniques; Optical arrays; Optical buffering; Optical device fabrication; Optical feedback; Optical films; Probes; Scanning electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-3889-8
Type :
conf
DOI :
10.1109/CLEOPR.1997.610533
Filename :
610533
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2679628
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