Title :
Tunable MEMS fiber scanner for confocal microscopy
Author :
Weber, N. ; Meinert, Tobias ; Zappe, H. ; Seifert, Andreas
Author_Institution :
Dept. of Microsyst. Eng. - IMTEK, Univ. of Freiburg, Freiburg, Germany
Abstract :
We present an endoscopic probe with a forward-looking piezoelectric fiber scanner for confocal optical imaging. The probe, with an outer diameter of 2.5 mm and a length of 13 mm, features a tunable lens to allow confocal depth scanning up to 100 μm without any movable optics or stages. Imaging below 2 μm lateral, and 20 μm axial resolution was successfully demonstrated.
Keywords :
bioMEMS; biomedical optical imaging; endoscopes; optical microscopy; piezoelectricity; axial resolution; confocal depth scanning; confocal microscopy; confocal optical imaging; endoscopic probe; forward-looking piezoelectric fiber scanner; size 13 mm; size 2.5 mm; tunable MEMS fiber scanner; Electron tubes; Image resolution; Lenses; Optical fibers; Optical imaging; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765782
