DocumentCode :
268000
Title :
Liquid droplet micro-bearings on directional circular surface ratchets
Author :
Varel, Cagdac ; Bohringer, Karl F.
Author_Institution :
Univ. of Washington, Seattle, WA, USA
fYear :
2014
fDate :
26-30 Jan. 2014
Firstpage :
983
Lastpage :
986
Abstract :
This paper presents de-ionized water droplets used as torque-generating micro-bearings between a glass plate and a micromachined Si substrate. The pattern on the Si substrate includes circular tracks, which allow droplet motion in a single direction. When vertical vibration is applied to the system, a rotation in the transverse plane is triggered. The system can be tailored to respond to a specific vibration frequency, from 36.5 to 83 Hz for droplet volumes from 13 to 1 μL. The system is tested for its frequency response at different droplet sizes and droplet counts. A figure of merit is determined to quantify the responsiveness of the system. The largest angular speed is recorded as 0.302 rad/s for a vibration at 61 Hz.
Keywords :
ball bearings; drops; micromachining; micromechanical devices; silicon; Si; circular tracks; deionized water droplets; directional circular surface ratchets; droplet motion; frequency 36.5 Hz to 83 Hz; frequency 61 Hz; frequency response; glass plate; liquid droplet microbearings; micromachined Si substrate; torque-generating microbearings; transverse plane rotation; vertical vibration; vibration frequency; Glass; Liquids; Micromechanical devices; Silicon; Substrates; Tracking; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
Type :
conf
DOI :
10.1109/MEMSYS.2014.6765808
Filename :
6765808
Link To Document :
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