DocumentCode :
2680051
Title :
Optimization and control of PVD TiN uniformity
Author :
Asinovsky, L.
Author_Institution :
Rudolph Technologies Inc.
fYear :
1997
fDate :
16-19 March 1997
Firstpage :
45
Lastpage :
46
Keywords :
Atherosclerosis; Conductivity; Gas lasers; Inorganic materials; Metallization; Metrology; Production; Sputtering; Thickness measurement; Tin;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
ISSN :
1266-0167
Type :
conf
DOI :
10.1109/MAM.1998.887506
Filename :
887506
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2680051
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