DocumentCode

2680051

Title

Optimization and control of PVD TiN uniformity

Author

Asinovsky, L.

Author_Institution

Rudolph Technologies Inc.

fYear

1997

fDate

16-19 March 1997

Firstpage

45

Lastpage

46

Keywords

Atherosclerosis; Conductivity; Gas lasers; Inorganic materials; Metallization; Metrology; Production; Sputtering; Thickness measurement; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

conf

DOI

10.1109/MAM.1998.887506

Filename

887506