Title :
A method for measuring the thickness of a glass plate
Author :
Jian, Zhi-Cheng ; Hsu, Cheng-Chih ; Su, Der-Chin
Author_Institution :
Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
A method for measuring the thickness of a glass plate is presented by using the heterodyne interferometry and the two-wavelength interferometry. The phase difference variations due to the wavelength shift and the extraction of the glass plate are measured. Then, its thickness can be calculated under the conditions that the refractive index and the data of wavelength shift are specified.
Keywords :
heterodyne detection; phase shifting interferometry; refractive index; thickness measurement; glass plate; heterodyne interferometry; phase difference variations; refractive index; thickness measurement; two-wavelength interferometry; wavelength shift; Data mining; Electronic equipment testing; Frequency measurement; Glass; Intensity modulation; Light sources; Optical polarization; Phase measurement; Thickness measurement; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1276951
