DocumentCode :
2680139
Title :
Thermal stress effects on capacitance and current characteristics of Cu/si and Cu/TiN/Si schottky-diodes
Author :
Ahrens, C. ; Ferretti, R. ; Friese, G. ; Weidner, J.-O.
Author_Institution :
Universitat Hannover
fYear :
1997
fDate :
16-19 March 1997
Firstpage :
56
Lastpage :
58
Keywords :
Capacitance; Capacitance-voltage characteristics; Copper; Frequency; Metallization; Schottky diodes; Space charge; Temperature dependence; Thermal stresses; Tin;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
ISSN :
1266-0167
Type :
conf
DOI :
10.1109/MAM.1998.887512
Filename :
887512
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2680139
بازگشت