DocumentCode
2680181
Title
Integration evaluation of low permittivity silicon based spin an materials as IMD
Author
Pires, F. ; Noël, P. ; Lecornec, Ch ; Passemard, G.
Author_Institution
CEA Grenoble LETI GRESSI
fYear
1997
fDate
16-19 March 1997
Firstpage
68
Lastpage
70
Keywords
Adhesives; Dielectric constant; Dielectric materials; Inorganic materials; Permittivity; Plasma applications; Plasma chemistry; Plasma materials processing; Resists; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location
Villard de Lans, France
ISSN
1266-0167
Type
conf
DOI
10.1109/MAM.1998.887515
Filename
887515
Link To Document