DocumentCode
2680238
Title
Al reflow studies for deep-submicron structures : properties and microstructure
Author
Webster, M.N. ; Dirks, A.G.
Author_Institution
Philips Research Laboratories
fYear
1997
fDate
16-19 March 1997
Firstpage
82
Lastpage
83
Keywords
Artificial intelligence; Electrical resistance measurement; Inorganic materials; Laboratories; Metallization; Microstructure; Rough surfaces; Surface roughness; Temperature; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location
Villard de Lans, France
ISSN
1266-0167
Type
conf
DOI
10.1109/MAM.1998.887519
Filename
887519
Link To Document