Title :
High pressure aluminium for sub-micron vias using a liquid transducer
Author :
Jongste, F. ; Li, X. ; Lokker, J.P. ; Janssen, G.C.A.M. ; Radelaar, S.
Author_Institution :
Delft University of Technology
Keywords :
Aluminum; Compressive stress; Metallization; Petroleum; Silicon; Temperature distribution; Temperature measurement; Tensile stress; Thermal stresses; Transducers;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887520
