• DocumentCode
    2680299
  • Title

    Advanced materials for interconnections of the future - need and strategy

  • Author

    Murarka, S.P.

  • Author_Institution
    SRC Center for Advanced Interconnect Science and Technology
  • fYear
    1997
  • fDate
    16-19 March 1997
  • Firstpage
    93
  • Lastpage
    93
  • Keywords
    Costs; Inorganic materials; Integrated circuit interconnections; Integrated circuit manufacture; Integrated circuit technology; Lead compounds; Materials science and technology; Metallization; Semiconductor device manufacture; Semiconductor materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
  • Conference_Location
    Villard de Lans, France
  • ISSN
    1266-0167
  • Type

    conf

  • DOI
    10.1109/MAM.1998.887524
  • Filename
    887524
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2680299