Title :
Kinetics of the C49-C54 phase transition in TiSi2, new indications from sheet resistance, infrared spectroscopy and molecular dynamics simulations
Author :
Grimaldi, M.G. ; La Via, F. ; Bocelli, S. ; Galli, M. ; Marabelli, F. ; Migilo, L. ; Bonoli, F.
Author_Institution :
University of Catania and INFM
Keywords :
Annealing; Atomic force microscopy; Grain size; Infrared spectra; Inorganic materials; Kinetic theory; Metallization; Physics; Silicides; Temperature;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887532