DocumentCode
2680419
Title
Formation of ultra-thin PtSi layers with a 2-step silicidation process
Author
Donaton, R.A. ; Jin, S. ; Bender, H. ; Maex, K. ; Vantomme, A. ; Langouche, G.
Author_Institution
IMEC
fYear
1997
fDate
16-19 March 1997
Firstpage
118
Lastpage
119
Keywords
Atomic force microscopy; Inorganic materials; Metallization; Silicidation; Silicides; Silicon; Sputter etching; Sputtering; Thickness control; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location
Villard de Lans, France
ISSN
1266-0167
Type
conf
DOI
10.1109/MAM.1998.887534
Filename
887534
Link To Document