Title :
Capacitive feedback controlled PZT micro mirror arrays for wavelength selective switch
Author :
Uchino, Ryohei ; Misaki, Tokiko ; Fujimura, Takashi ; Torayashiki, Osamu
Author_Institution :
Sumitomo Precision Products Co., Ltd., Japan
Abstract :
We developed a single-axis mechanical micro mirror array used for gridless wavelength selective switch (WSS). The mirrors are driven by lead zirconate titanate (PZT) unimorph actuators, which is adequate for low-voltage actuation and low interference with adjacent mirrors in operation. In addition, the mirror tilt angle is feedback-controlled using comb-shaped capacitance in order to realize high control resolution. We fabricated a prototype mirror array by using simple semiconductor wafer process technologies, and evaluated its basic performance. In conclusion, we realized a high fill factor of over 98%, 5 mechanical angle at 10 V, and high control resolution under 0.01.
Keywords :
integrated optics; integrated optoelectronics; lead compounds; micro-optomechanical devices; microfabrication; micromirrors; optical arrays; optical fabrication; optical switches; piezoelectric actuators; semiconductor technology; zirconium compounds; PZT; WSS; capacitive feedback controlled PZT micromirror arrays; comb-shaped capacitance; gridless wavelength selective switch; high control resolution; high fill factor; lead zirconate titanate unimorph actuators; low interference; low-voltage actuation; mirror tilt angle; semiconductor wafer process technology; single-axis mechanical micromirror array; wavelength selective switch; Actuators; Capacitance; Detectors; Electrodes; Micromechanical devices; Mirrors; Optical switches;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765851
