Cylindrical lens with integrated piezo actuation for focal length tuning and lateral scanning

Author

Sturmer, Michael ; Schatz, Andreas ; Wallrabe, U.

Author_Institution

Lab. for Microactuators, Univ. of Freiburg, Freiburg, Germany

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

1171

Lastpage

1174

Abstract

We present a tunable cylindrical lens with an integrated actuation. Our device provides a large usable aperture of ca. 4 × 8 mm² and a tuning range of the focal length of more than 20 dpt. Additionally, it provides the possibility to move the lens vertex along one axis. The lens therefore enables scanning of the generated line focus. In this paper we describe the design with an actuator geometry which is optimized for good cylindricity, i.e. ratio of refractive power in the major and minor lens direction. Subsequently, a process for prototype fabrication as well as a characterization of the tuning and scanning behavior are shown.

Keywords

integrated optics; lenses; optical design techniques; optical fabrication; optical focusing; optical scanners; optical tuning; piezoelectric actuators; actuator geometry; cylindricity; focal length tuning; integrated piezoactuation; lateral scanning; lens vertex; line focus; prototype fabrication; refractive power; tunable cylindrical lens; Actuators; Focusing; Geometry; Lenses; Prototypes; Substrates; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765855

Filename

6765855