Cylindrical lens with integrated piezo actuation for focal length tuning and lateral scanning

We present a tunable cylindrical lens with an integrated actuation. Our device provides a large usable aperture of ca. 4 × 8 mm² and a tuning range of the focal length of more than 20 dpt. Additionally, it provides the possibility to move the lens vertex along one axis. The lens therefore enables scanning of the generated line focus. In this paper we describe the design with an actuator geometry which is optimized for good cylindricity, i.e. ratio of refractive power in the major and minor lens direction. Subsequently, a process for prototype fabrication as well as a characterization of the tuning and scanning behavior are shown.