Title :
Slow-Wave Coplanar Waveguide on Periodically Doped Semiconductor Substrate
Author :
Fukuoka, Y. ; Itoh, T.
fDate :
May 31 1983-June 3 1983
Abstract :
A metal-insulator-semiconductor (MIS) coplanar waveguide with periodically doped substrate is described. Reduction of attenuation and enhancement of the slow-wave factor are observed, compared to the uniform MIS coplanar waveguide. The structure is experimentally simulated and shows good agreement with theory.
Keywords :
Attenuation; Conductivity; Coplanar waveguides; Frequency; Integral equations; Metal-insulator structures; Planar transmission lines; Propagation constant; Semiconductor waveguides; Substrates;
Conference_Titel :
Microwave Symposium Digest, 1983 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
DOI :
10.1109/MWSYM.1983.1130925
