DocumentCode
2680491
Title
Slow-Wave Coplanar Waveguide on Periodically Doped Semiconductor Substrate
Author
Fukuoka, Y. ; Itoh, T.
fYear
1983
fDate
May 31 1983-June 3 1983
Firstpage
399
Lastpage
401
Abstract
A metal-insulator-semiconductor (MIS) coplanar waveguide with periodically doped substrate is described. Reduction of attenuation and enhancement of the slow-wave factor are observed, compared to the uniform MIS coplanar waveguide. The structure is experimentally simulated and shows good agreement with theory.
Keywords
Attenuation; Conductivity; Coplanar waveguides; Frequency; Integral equations; Metal-insulator structures; Planar transmission lines; Propagation constant; Semiconductor waveguides; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1983 IEEE MTT-S International
Conference_Location
Boston, MA, USA
ISSN
0149-645X
Type
conf
DOI
10.1109/MWSYM.1983.1130925
Filename
1130925
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