DocumentCode

2680543

Title

3D simulation of sputter deposition of titanium layers in contact holes with high aspect ratios

Author

Bar, E. ; Lorenz, J. ; Ryssel, H.

Author_Institution

Universitat Erlangen-Nurnberg

fYear

1997

fDate

16-19 March 1997

Firstpage

131

Lastpage

133

Keywords

Contacts; Filling; Geometry; Inorganic materials; Metallization; Predictive models; Shape; Solid modeling; Sputtering; Titanium;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

conf

DOI

10.1109/MAM.1998.887543

Filename

887543