Title :
3D simulation of sputter deposition of titanium layers in contact holes with high aspect ratios
Author :
Bar, E. ; Lorenz, J. ; Ryssel, H.
Author_Institution :
Universitat Erlangen-Nurnberg
Keywords :
Contacts; Filling; Geometry; Inorganic materials; Metallization; Predictive models; Shape; Solid modeling; Sputtering; Titanium;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887543
