DocumentCode

2680625

Title

Deposition of thin TiN films by low-power reactive magnetron sputtering

Author

Mikhal´chuk, P.V. ; Orlikovsky, A.A. ; Vasiliev, A.G. ; Lebedev, O.I. ; Zakharov, D.N.

Author_Institution

Russian Academy of Sciences

fYear

1997

fDate

16-19 March 1997

Firstpage

143

Lastpage

145

Keywords

Conductivity; Magnetic materials; Magnetic multilayers; Nitrogen; Physics; Sputtering; Substrates; Temperature measurement; Tin; Titanium;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

conf

DOI

10.1109/MAM.1998.887549

Filename

887549