Influence of processing parameters on selectivity in a cvd-process of copper using Cu/sup +1/(hfac)(TMVS)

Author

Friese, G. ; Abdul-Hak, A. ; Schwierzi, B. ; Höhne, U.

Author_Institution

Universitat Hannover

fYear

1997

fDate

16-19 March 1997

Firstpage

152

Lastpage

154

Keywords

Aluminum alloys; Conductivity; Copper; Electrons; Inductors; Inorganic materials; MOCVD; Metallization; Tungsten; Ultra large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

DOI

10.1109/MAM.1998.887553

Filename

887553

Link To Document