Title :
The change of electrical properties of the aluminum-porous silicon contact by thermal annealing
Author :
Zimin, S.P. ; Komarov, E.P.
Author_Institution :
Yaroslavl State University Sovetskaya
Keywords :
Annealing; Charge carriers; Contacts; Etching; Hydrogen; Impurities; Inorganic materials; Passivation; Plasma temperature; Silicon;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887556
