DocumentCode :
2680734
Title :
Optimized indium oxide films prepared by DC magnetron sputtering
Author :
Axelevitch, A. ; Rabinovitch, E. ; Golan, G.
Author_Institution :
Center for Technological Education and The Open University Israel
fYear :
1997
fDate :
16-19 March 1997
Firstpage :
162
Lastpage :
162
Keywords :
Argon; Coatings; Conductive films; Conductivity; Glass; Indium; Mathematical model; Optical films; Process control; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
ISSN :
1266-0167
Type :
conf
DOI :
10.1109/MAM.1998.887557
Filename :
887557
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2680734
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