Title :
Raman study of tungsten disilicide formation in thin films
Author :
Chaix-Pluchery, O. ; Lucazeau, G. ; Meyer, F. ; Aubry-Fortuna, V. ; Madar, R.
Author_Institution :
LMGP
Keywords :
Annealing; Frequency; Raman scattering; Semiconductor films; Spectroscopy; Substrates; Thermal conductivity; Transistors; Tungsten; X-ray diffraction;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887563