مرکز منطقه ای اطلاع رساني علوم و فناوري - EXAFS investigation of Co sites in CoSi<sub>2</sub> film grown by ion beam assisted deposition

DocumentCode :

2680926

Title :

EXAFS investigation of Co sites in CoSi₂ film grown by ion beam assisted deposition

Author :

Terrasi, A. ; La Via, F. ; Acapito, F.D. ; Mobilio, S.

Author_Institution :

Istituto Nazionale di Metodologie e Tecnologie per la Microelettronica - CNR

fYear :

1997

fDate :

16-19 March 1997

Firstpage :

189

Lastpage :

190

Keywords :

Annealing; Argon; Atherosclerosis; Cobalt; Current density; Fourier transforms; Inorganic materials; Ion beams; Metallization; Silicides;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location :

Villard de Lans, France

ISSN :

1266-0167

Type :

conf

DOI :

10.1109/MAM.1998.887569

Filename :

887569

Link To Document :