DocumentCode

2680941

Title

Reaction sequence of thin ni films with [001] 3C-SiC

Author

Gasser, S.M. ; Bachli, A. ; Kolawa, E. ; Nicolet, M.A.

Author_Institution

California Institute of Technology

fYear

1997

fDate

16-19 March 1997

Firstpage

191

Lastpage

191

Keywords

Annealing; Backscatter; Chemical elements; Mass spectroscopy; Microstructure; Nickel; Phase detection; Silicon carbide; Temperature; X-ray diffraction;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

conf

DOI

10.1109/MAM.1998.887570

Filename

887570