Title :
Reaction sequence of thin ni films with [001] 3C-SiC
Author :
Gasser, S.M. ; Bachli, A. ; Kolawa, E. ; Nicolet, M.A.
Author_Institution :
California Institute of Technology
Keywords :
Annealing; Backscatter; Chemical elements; Mass spectroscopy; Microstructure; Nickel; Phase detection; Silicon carbide; Temperature; X-ray diffraction;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887570