DocumentCode

2680976

Title

Solid state reactions and barrier properties of the thin films Ti-W on the silicon

Author

Makogon, Yu.N. ; Maximovich, L.P. ; Sidorenko, S.I.

Author_Institution

National Technic Univercity of Ukraine "Kyiv Polytechnical Institute"

fYear

1997

fDate

16-19 March 1997

Firstpage

198

Lastpage

198

Keywords

Aluminum; Annealing; Heat treatment; Physics; Semiconductor thin films; Silicon; Solid state circuits; Sputtering; Temperature distribution; Vacuum technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

conf

DOI

10.1109/MAM.1998.887573

Filename

887573