DocumentCode
2681006
Title
Solid solution disilicide thin films : formation, structure, properties and application
Author
Dvorina, L.
Author_Institution
Institute for problem of materials, Ukrainian Acad. of Sciences
fYear
1997
fDate
16-19 March 1997
Firstpage
201
Lastpage
202
Keywords
Crystalline materials; Crystallization; Inorganic materials; Land surface temperature; Plasma temperature; Production; Solids; Sputtering; Temperature dependence; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location
Villard de Lans, France
ISSN
1266-0167
Type
conf
DOI
10.1109/MAM.1998.887575
Filename
887575
Link To Document