Title :
Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy
Author :
Nakamura, Daisuke ; Takao, Takayuki ; Oki, Yuji ; Maeda, Mitsuo
Author_Institution :
Graduate Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka, Japan
Abstract :
A nanometer-scaled layer removal of a surface of poly-methylmethacrylate was attained by a single laser shot from a pulsed excimer laser ablation. The combination of the removal and laser fluorescence spectroscopy demonstrated a nanometer-scaled element analysis on a solid surface.
Keywords :
excimer lasers; fluorescence; high-speed optical techniques; laser ablation; optical polymers; surface structure; laser ablation atomic fluorescence spectroscopy; nanometer-scaled solid state surface; poly-methylmethacrylate; pulsed excimer laser ablation; trace element analysis; Atom lasers; Atomic beams; Atomic layer deposition; Fluorescence; Laser ablation; Optical pulses; Solid lasers; Solid state circuits; Spectroscopy; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277028
