Title :
A full colour LCD addressed by poly Si TFTS fabricated at low temperature below 450 degrees C
Author :
Yuki, Masahiro ; Masumo, K. ; Takafuji, S. ; Asakawa, T. ; Imajyo, N. ; Kunigita, M.
Author_Institution :
Asahi Glass Electron Products Res. & Dev. Centre Co. Ltd., Yokohama, Japan
Abstract :
A process below 450 degrees C has been developed for poly-Si thin-film transistor (TFTs). The devices have higher mobility ( approximately 50 cm/sup 2//V-s) and higher reliability than a-Si TFTs. A 3.5-in. full-colour liquid-crystal display addressed by these poly-Si TFTs is described.<>
Keywords :
MOS integrated circuits; driver circuits; elemental semiconductors; liquid crystal displays; semiconductor technology; silicon; thin film transistors; 3.5 inch; 450 degC; colour LCD; mobility; polycrystalline Si; reliability; Chromium; Costs; Crystallization; Filters; Glass; Liquid crystal displays; TV; Temperature; Thin film transistors; Voltage;
Conference_Titel :
Display Research Conference, 1988., Conference Record of the 1988 International
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/DISPL.1988.11315
