DocumentCode
2682515
Title
Fabricating a silicon microlens mold by ICP dry etching
Author
Chen, R.L. ; Wang, C.M. ; Chang, J.Y.
Author_Institution
Inst. of Opt. Sci., Nat. Central Univ., Taoyuan, Taiwan
Volume
2
fYear
2003
fDate
15-19 Dec. 2003
Abstract
In this paper, a silicon mold, with spherical/aspherical concave microlens arrays, was made by using ICP dry etching technique. A PMMA microlens was molded by using this mold and then tested by SEM, Dektakprofiler and etc.
Keywords
elemental semiconductors; etching; microlenses; moulding; optical arrays; optical fabrication; optical testing; plasma materials processing; silicon; Dektak profiler; ICP dry etching; PMMA microlens; SEM; Si; aspherical concave microlens arrays; silicon microlens mold fabrication; Cities and towns; Dry etching; Focusing; Ion beams; Lenses; Microoptics; Optical arrays; Optical sensors; Silicon; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1277112
Filename
1277112
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