Title :
A novel Si-based stacked free space pick-up head and holographic optical element
Author :
Lee, Chien Chieh ; Chang, Jenq Yang ; Chang, Yu Cheng ; Chi, Guo Chung
Author_Institution :
Opt. Sci. Center, Nat. Central Univ., Jung-Li, Taiwan
Abstract :
We propose an optical pick-tip head system, which can be used in optical MEMS technology, has been designed on stacked Si substrates. Transmission holographic grating was fabricated and studied the diffraction effect of the holographic optical element.
Keywords :
diffractive optical elements; holographic gratings; micromechanical devices; optical design techniques; optical fabrication; silicon compounds; Si; Si-based stacked free space pick-up head; SiNx; diffraction effect; holographic optical element; optical MEMS technology; optical pick-tip head system; stacked Si substrates; transmission holographic grating fabrication; Biomembranes; DVD; Diffraction gratings; Holographic optical components; Holography; Micromechanical devices; Optical design; Optical devices; Optical diffraction; Physics;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277115
