DocumentCode
2682568
Title
A novel Si-based stacked free space pick-up head and holographic optical element
Author
Lee, Chien Chieh ; Chang, Jenq Yang ; Chang, Yu Cheng ; Chi, Guo Chung
Author_Institution
Opt. Sci. Center, Nat. Central Univ., Jung-Li, Taiwan
Volume
2
fYear
2003
fDate
15-19 Dec. 2003
Abstract
We propose an optical pick-tip head system, which can be used in optical MEMS technology, has been designed on stacked Si substrates. Transmission holographic grating was fabricated and studied the diffraction effect of the holographic optical element.
Keywords
diffractive optical elements; holographic gratings; micromechanical devices; optical design techniques; optical fabrication; silicon compounds; Si; Si-based stacked free space pick-up head; SiNx; diffraction effect; holographic optical element; optical MEMS technology; optical pick-tip head system; stacked Si substrates; transmission holographic grating fabrication; Biomembranes; DVD; Diffraction gratings; Holographic optical components; Holography; Micromechanical devices; Optical design; Optical devices; Optical diffraction; Physics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1277115
Filename
1277115
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