Title :
The application of three-intensity measurement technique in ellipsometry
Author :
Lee, K.Y. ; Chen, C.J. ; Chao, Y.E.
Author_Institution :
Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
A three-intensity technique is applied in ellipsometry for measuring the ellipsometric parameters of a polymer thin film surface. In addition to the thickness of polymer film, the regions of pure substrate, intermediate and polymer are studied separately.
Keywords :
ellipsometry; optical films; optical polymers; polymer films; thickness measurement; ellipsometric parameters measurement; ellipsometry; nondestructive measurement; polymer film; polymer thin film surface; pure substrate; three-intensity measurement technique; three-intensity technique; Chaos; Dielectric measurements; Dielectric substrates; Dielectric thin films; Ellipsometry; Measurement techniques; Optical films; Optical polarization; Polymer films; Thickness measurement;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277127
