• DocumentCode
    2684147
  • Title

    Lanthanum fluoride optical thin films deposited by resistive heater with ion-assisted at room temperature

  • Author

    Liu, Ming-Chung ; Lee, Cheng-Chug ; Tung, Chi-Hong

  • Author_Institution
    Inst. of Opt. Sci., Nat. Central Univ., Chung-li, Taiwan
  • Volume
    2
  • fYear
    2003
  • fDate
    15-19 Dec. 2003
  • Abstract
    Lanthanum fluoride (LaF3) optical thin film prepared by resistive heater at room temperature has been investigated. The working parameters of ion source in the ion-assisted process strongly influence the optical behavior and surface morphology of the deposited film in UV and visible regimes.
  • Keywords
    antireflection coatings; ion beam assisted deposition; lanthanum compounds; optical films; surface morphology; ultraviolet spectra; visible spectra; 20 degC; LaF3; UV regime; ion-assisted process; lanthanum fluoride optical thin films; optical behavior; resistive heater; room temperature; surface morphology; thin film deposition; visible regime; Coatings; Lanthanum; Optical films; Optical materials; Optical surface waves; Optimized production technology; Particle beam optics; Surface morphology; Temperature; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
  • Print_ISBN
    0-7803-7766-4
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2003.1277198
  • Filename
    1277198
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2684147