Title :
Electric field dependence of TDDB activation energy in ultrathin oxides
Author :
Vincent, E. ; Evil, N. ; Papadas, C. ; Ghibaudo, G.
Author_Institution :
SGS-THOMSON Microelectronics
Keywords :
Acceleration; Attenuation; Capacitors; Electric breakdown; Extrapolation; Life estimation; Lifetime estimation; Microelectronics; Stress; Temperature dependence;
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
DOI :
10.1109/ESREF.1996.888181